Amtech Systems Funding Rounds

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Date	Acquired	Amount
Jan 30, 2015	BTU International	Undisclosed amount
Dec 30, 2014	SoLayTec	Undisclosed amount
Feb 21, 2011	Kingstone Semiconductor Co Ltd	Undisclosed amount
Dec 10, 2007	R2D Ingenierie SAS	Undisclosed amount
Jul 01, 2004	Bruce Technologies	Undisclosed amount
Jul 01, 1997	PR Hoffman	Undisclosed amount
Jan 01, 1994	Tempress Systems	Undisclosed amount